Description:-
VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.
Specifications:
• Aluminum casting case to keep spinning stably • The liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions • Drainage outlet and vacuum pump connector are on the back panel • One filter is included in the standard package. It is used to connect the coater for preventing wastewater flowing into the pump • One oil-less vacuum pump is included in the standard package, please click here for specification detailsRead More